2026-10-14T11:53:48Z https://board.unimib.it/oai

oai:board.unimib.it/bk82wc727y.1 2025-08-05T06:06:07Z

Giulio, Federico Toward Scalable Manufacturing of Doped Silicon Nanopillars for Thermoelectrics via Metal-Assisted Chemical Etching - Data Bicocca Open Archive Research Data These data are part of a systematic study on the localized and non-localized etch rates of silicon nanopillars produced using Metal-Assisted Chemical Etching (MACE) for thermoelectric applications. Specifically, they represent a collection of etch rates as a function of doping level for both p-type and n-type silicon, using both 1-pot and 2-pot MACE processes. Data are available in both .csv and .xlsx format. Thermoelectrics Silicon Nanowire Advanced Material Dataset doi:10.17632/bk82wc727y.1 oai:board.unimib.it/bk82wc727y.1 Creative Commons Attribution 4.0 International http://creativecommons.org/licenses/by/4.0 https://board.unimib.it/datasets/bk82wc727y 2025-08-05T06:06:07Z